Heterodyne Fizeau interferometer for testing flat surfaces

Details Heterodyne Fizeau interferometer for testing flat surfaces Heterodyne Fizeau interferometer for testing flat surfaces

Jul 1987

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1987apopt..26.2804b&link_type=ejournal

Applied Optics, Volume 26, Issue 14, July 15, 1987, pp.2804-2809

Physics

Optics

3

Interferometry, Surfaces, Metrology, Optical Testing

Scientific paper

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