Heavy ion elastic recoil detection analysis set up for electronic sputtering studies

Details Heavy ion elastic recoil detection analysis set up for electronic sputtering studies Heavy ion elastic recoil detection analysis set up for electronic sputtering studies

Apr 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006reds..161..247g&link_type=abstract

Radiation Effects and Defects in Solids, vol. 161, no. 4, p. 247-255.

Physics

1

Amorphous Metals, Light-Elements, Irradiation, Telescope, Erda, Temperature, Copper, Films

Scientific paper

Heavy ion elastic recoil detection analysis (ERDA) set up with a large solid angle (greater than or similar to 4.8 msr) Delta E - E position-sensitive telescope detector is developed at Inter University Accelerator Centre as a dedicated facility for the study of electronic sputtering of thin films under swift heavy ion (SHI) irradiation. The detector consists of a gas ionization chamber (Delta E ) and a solid-state surface barrier detector ( E ) housed in a same assembly. The electronic sputtering yield (atoms/ion) is determined by analyzing on-line fluence-dependent ERDA data obtained from a variety of thin films. Large erosion (> 10 5 atoms/ion) of carbon from a-C:H by 150 MeV Ag 13+ ions, evolution of nitrogen (greater than or similar to 880 atoms/ion) from copper nitride and depletion of oxygen (greater than or similar to 1000 atoms/ion) from copper oxide film under 200 MeV Au 15+ ion impact are studied and reported in this work. The electronic sputtering of these materials is discussed on the basis of the thermal spike model of SHI and solid interaction.

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