Growth, composition, and surface structure of Hg(1-x)Cd(x)Te plasma oxides

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Crystal Growth, Mercury Cadmium Tellurides, Molecular Beam Epitaxy, Oxidation, Plasma Interactions, Single Crystals, Auger Spectroscopy, Metal Oxides, Microstructure, Photoelectron Spectroscopy, Surface Properties, X Ray Spectroscopy

Scientific paper

Mercury cadmium telluride molecular beam epitaxially (MBE) grown layers were plasma ozidized at the rate of 8-10 A/min. The thickness of the grown oxide inversely depended on the mercury content in the compound. The oxide composition was studied using X-ray photoelectron spectroscopy surace analysis and Auger electron spectroscopy depth profiling. The plasma oxide consisted of a mixture of Cd and Te oxides. Oxygen incorporation in the oxide layer was greatly enhanced after etching and reoxidation. This is attributed to the large depletion of Hg in the reoxidized sample. Preliminary scanning electron microscopy surface microstructure studies showed very smooth surface for both the MBE layer and the plasma oxide. The oxide-HgCdTe interface appeared to be smooth as well.

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