Grating interferometer for flatness testing

Details Grating interferometer for flatness testing Grating interferometer for flatness testing

Feb 1996

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1996optl...21..228d&link_type=abstract

Optics Letters, Volume 21, Issue 3, February 1, 1996, pp.228-230

Physics

Optics

11

Instrumentation: Measurement: And Metrology, Interferometry, Optical Design And Fabrication, Optical Testing

Scientific paper

Two diffraction gratings placed in front of a flat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 mu m , depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.

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