GHz optomechanical resonators with high mechanical Q factor in air

Physics – Optics

Scientific paper

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6 pages, 4 figures

Scientific paper

We demonstrate wheel-shaped silicon optomechanical resonators for resonant
operation in ambient air. The high finesse of optical whispering gallery modes
(loaded optical Q factor above 500,000) allows for efficient transduction of
the wheel resonator's mechanical radial contour modes of frequency up to 1.35
GHz with high mechanical Q factor around 4,000 in air.

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