Fully automated angle resolved scatterometer

Details Fully automated angle resolved scatterometer Fully automated angle resolved scatterometer

Sep 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2210..543n&link_type=abstract

Proc. SPIE Vol. 2210, p. 543-552, Space Optics 1994: Space Instrumentation and Spacecraft Optics, Thierry M. Dewandre; Joachim J

Physics

Optics

1

Scientific paper

The ARS-scatterometer at the IOF Jena which has been designed and built in cooperation with the Carl Zeiss JENA GmbH is capable of performing accurate measurements of the BRDF over a range of approximately eleven orders of magnitude (from 10(superscript 5) to 10(superscript -6) sr(superscript -1)) in BRDF. These measurements can be carried out for surfaces made of any dielectric, metallic or semiconductor material. A He-Ne-laser is used in conjunction with a mirror beam focusing optics. The eight motorized degrees of freedom of the instruments are computer controlled and interfaced to the user by a sophisticated software running under MicroSoft Windows. It is shown, that the scatterometer is sensitive to a rms-roughness better than 1 nm.

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