Focusing of x-rays using micromachined silicon lobster eye lenses

Details Focusing of x-rays using micromachined silicon lobster eye lenses Focusing of x-rays using micromachined silicon lobster eye lenses

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..227c&link_type=abstract

Proc. SPIE Vol. 2011, p. 227-231, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds

Physics

Optics

1

Scientific paper

We are developing a novel x-ray lens based on a 1D analogue of the optical system of the lobster's eye. The lobster eye lens consists of a large number of flat reflecting surfaces with 100 micrometers separation between adjacent surfaces. We have used silicon micromachining to fabricate arrays of 100 micrometers sized optical elements in <110> oriented single crystal silicon wafers. We used a concentrated KOH solution to anisotropically etch single crystal silicon wafers; the resulting surfaces were aligned with the <111> planes perpendicular to the face of the wafer. The pores were 50 micrometers wide and 800 micrometers deep, for an aspect ratio of 16:1. We report on the fabrication techniques and measurements of the surface microroughness of the etched surfaces.

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