Physics – Optics
Scientific paper
Sep 1995
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1995spie.2640..100t&link_type=abstract
Proc. SPIE Vol. 2640, p. 100-110, Microlithography and Metrology in Micromachining, Michael T. Postek; Ed.
Physics
Optics
Scientific paper
Focused ion-beams have proved to be a superior means of fabricating holes between 5 and 20 microns in diameter, through gold and tungsten sheets over 40 microns thick. These holes are milled with an FEI FIB800 Focused Ion Beam Workstation using a Ga liquid metal source, with and without an enhancement gaseous etchant. They will be used as apertures for detectors that probe the point response function of the X-ray optics (Wolter Type-I mirror pairs), which form part of the NASA Advanced X-ray Astrophysical Facility. It is found that both pure milling and gas-assisted etching produced micron-sized holes of a quality superior to those produced by laser beam sputtering.
Kellogg Edwin M.
Porterfield Don
Tsiang Eugene Y.
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