Computer Science – Robotics
Scientific paper
Aug 1999
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1999spie.3834..172h&link_type=abstract
Proc. SPIE Vol. 3834, p. 172-181, Microrobotics and Microassembly, Bradley J. Nelson; Jean-Marc Breguet; Eds.
Computer Science
Robotics
1
Scientific paper
Compact fast-steering two axis-tilt mirrors are key components in astronomy, laser communications, material processing applications, imaging systems, biomedical and ophthalmologic applications. The laser scanner presented in this paper can perform a variety of functions such as tracking, beam stabilization and alignment, pointing and scanning. The small overall volume of 30 X 40 X 50 mm3 can lead to a very stable and compact system design. The fact that the steered mirror has a single point of rotation for the two tilt axes is a clear advantage for systems with scanning lenses designed for this purpose. The scanner is composed of one single mirror driven by two pairs of push-pull linear electromagnetic actuators. The suspension of the mirror is based on a cone-ball bearing with optimized friction and wear behavior. A Position Sensitive Detector integrated in the module is used for the closed loop feedback positioning. The mirror can be tilted by more than +/- 52 mrad (+/- 3 degree(s)) with an accuracy better than 50 (mu) rad. A differential resolution of the order of 5 (mu) rad and a settling time for maximum deflection of 9 ms is achieved. Due to the large active area of the mirror (30 mm X 40 mm), very small spot diameters can be reached (less than 1 micrometers ) using high quality laser beams. Therefore, the scanner can be used e.g. in high precision micro-material processing of semiconductor and sensor industry.
Hafez Moustapha
Sidler Thomas C.
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