Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon

Details Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon

2004-09-02

arxiv.org/abs/physics/0409021v1

Physics

Optics

3 pages, 4 figures. Fig. 4 may not print correctly on some printers due to image compression

Scientific paper

Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.

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