Fabrication and test of soft X-ray multilayer diffraction gratings.

Details Fabrication and test of soft X-ray multilayer diffraction gratings. Fabrication and test of soft X-ray multilayer diffraction gratings.

Jul 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1160..280b&link_type=abstract

Conference on X-Ray/EUV Optics for Astronomy and Microscopy, p. 280 - 285

Physics

Optics

5

Gratings: X Rays

Scientific paper

Holographic lithography was used to produce a 0.36 μm spatial period grating on top of a Mo/C layered synthetic microstructure. The pattern was transferred to the multilayer mirror by reactive ion etching. The performance of the device has been evaluated at the Cu Lα,β wavelength (1.33 nm). A simple theoretical model explains the main features of the diffraction efficiency of the soft X-ray highly dispersive multilayer mirror.

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