Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications

Details Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications

Nov 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1945..421m&link_type=abstract

Proc. SPIE Vol. 1945, p. 421-430, Space Astronomical Telescopes and Instruments II, Pierre Y. Bely; James B. Breckinridge; Eds.

Physics

Optics

1

Scientific paper

A novel micromachined electrostatically controlled deformable mirror has been fabricated and characterized. This device combines the fields of microinstruments, adaptive optics and controls to form a silicon-based mirror assembly that is relatively simple to process, inexpensive, lightweight, and integrable with drive and sensing electronics. Electrostatic control of a thin membrane mirror is demonstrated with low voltage actuation and without the need for complex construction of PZT or other translator-type arrays. In addition, the low- stress Si-rich Si(subscript x)N(subscript y) film used as the deformable membrane mirror is thermally matched to the silicon supporting frame. Custom design of the mirror shape can be implemented by redesigning the electrode pattern on an insulating substrate separate from the thin film mirror. Test results from a pull-only circular mirror with a single actuator are presented as a proof of concept for low voltage actuation of a low-stress Si(subscript x)N(subscript y) flexible membrane. The Si(subscript x)N(subscript y) which forms the membrane is under tensile stress. This tensile stress increase the voltage required for deflection of the membrane, but insures a linear relationship between the center deflection of the mirror and the applied pressure. This should significantly simplify the controls algorithm required for closed-loop operation of this device.

Affiliated with

Also associated with

No associations

Rating

Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Fabrication and characterization of a micromachined deformable mirror for adaptive optics applications will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-815350