Extreme ultraviolet transmission grating monochromator

Physics – Optics

Scientific paper

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Extreme Ultraviolet Radiation, Gratings (Spectra), Monochromators, Ultraviolet Spectrometers, Defocusing, Diffraction, Geometrical Optics, High Resolution, Imaging Techniques, Line Spectra, Ray Tracing

Scientific paper

A compact monochromator has been designed to utilize recently developed
free-standing XUV transmission gratings. Tests using a condensed spark
source of far UV radiation show that this monochromator, with 20-micron
slits, is capable of 0.08-nm resolution at 30 nm in the first order. A
physical description of the system and test results are presented.

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