Physics
Scientific paper
Oct 2005
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005aipc..799..315c&link_type=abstract
NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. AIP Conference Proceedings, Volum
Physics
Plasma Instability, Dusty Plasmas, Crystals, High-Frequency Discharges, Silicon Compounds, Argon, Waves, Oscillations, And Instabilities In Plasmas And Intense Beams, Dusty Or Complex Plasmas, Plasma Crystals, High-Frequency And Rf Discharges
Scientific paper
An experimental investigation of an instability occuring during the nanocrystallite formation is presented. The present study has been achieved in radiofrequency low pressure argon/silane plasmas. The analysis of the amplitude of the third harmonics of the discharge current and the self-bias voltage induced by the reactor asymmetry enables to follow the nanoparticle formation and growth. In some cases, at the end of the nanocrystallite accumulation phase, an instability occurs. A detailed study of the influence of several parameters on this instability behavior and frequencies is presented.
Boufendi Laifa
Cavarroc M.
Mikikian Maxime
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