Experimental comparison of the two- and the three-flat methods for absolute optical surface testing

Details Experimental comparison of the two- and the three-flat methods for absolute optical surface testing Experimental comparison of the two- and the three-flat methods for absolute optical surface testing

Nov 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997papop...6..773m&link_type=abstract

Pure and Applied Optics, Volume 6, Issue 6, pp. 773-777 (1997).

Physics

Optics

1

Scientific paper

In order to achieve nanometric precision along with high spatial resolution in absolute optical surface testing, we have developed a new version of the two-surface method and as an initial test applied it to a square field on optical flats. It was obviously necessary to extend the method to a more generally shaped field, which we shall discuss. Nanometric repeatability had been obtained, but accuracy requires a comparison with another method. In this paper, we give experimental results of a comparison with the three-flat method, along the section accessible to the latter method, showing nanometric agreement between the two methods.

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