Physics – Optics
Scientific paper
Mar 2004
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2004apopt..43.1835w&link_type=abstract
Applied Optics, Volume 43, Issue 9, pp. 1835-1848 (2004).
Physics
Optics
11
Optical Multilayers, Coatings, X-Ray Optics, Solar Radiation, Astronomical Instruments, Reflectivity, Optical Constants, Thin Films, Optical Properties, Astronomical Techniques, Optics
Scientific paper
We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths, as well as the greatest thermal stability. We also describe the optimization of multilayers designed for the Solar-B EIS instrument. Finally, we compare experimental reflectance data with calculations and conclude that currently available optical constants cannot be used to adequately model the performance of many of these multilayers.
Donguy Soizik
Kjornrattanawanich Benjawan
Seely John
Windt David L.
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