Physics – Optics
Scientific paper
Jan 1993
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1742..162k&link_type=abstract
In: Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography; Proceedings of the Meeting, San
Physics
Optics
Contamination, Dust, Paraboloid Mirrors, Surface Roughness, Test Facilities, X Ray Scattering, Image Resolution, Particle Size Distribution, Spatial Distribution, X Ray Imagery
Scientific paper
Relative surface brightness data from the VETA-1 test displayed an energy dependence which was inconsistent with models which assume surface roughness is the only cause of scattering. A means of separating an in-plane component of scattering caused by surface roughness from an azimuthally symmetric component, which is expected from dust, was afforded by images taken while only single quarters of the mirror surface were exposed. In this case, in-plane scattered X-rays should populate only opposing 90 deg azimuthal quadrants of an image centered on the focal point. As such, this approach is a novel, high sensitivity test for detecting extremely small (about 10 exp -5) fractional dust coverage on X-ray optics. Comparison of in-plane and out-of-plane quadrants in these tests indicated that most of the scattered data were azimuthally symmetric, and that the symmetric component was enhanced at lower energies. Both results support a model which invokes the wing scan results with a combination of dust and surface roughness induced scattering. The extent to which parameters such as the mirror surface roughness, dust size distribution, spatial distribution, and density may be determined using this approach is also discussed.
Elsner Ronald F.
Kolodziejeczak J. J.
O'Dell Stephen L.
Weisskopf Martin C.
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