Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics

Details Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics Evaluation by UV optical measurements of the imaging quality of grazing incidence x-ray optics

Feb 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011...89c&link_type=abstract

Proc. SPIE Vol. 2011, p. 89-99, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds.

Physics

Optics

Scientific paper

The use of an optical bench operating with UV or visible light, provide an easy and quick way for making a first assessment of the quality of replicated grazing incidence x-ray optics. The mirror to be analyzed is fully illuminated by means of a collimated beam of light and the image at the focal plane is analyzed with a CCD camera. The limit of this approach is given by the diffraction effect which could be important in the visible due to the large obscuration factor which is intrinsic to grazing incidence optics. The paper presents an analysis of the diffraction effect and how to separate the intrinsic aberrations from the diffraction. The use of an UV source (275 nm) is also reported in order to minimize the diffraction effects.

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