EUV performance of a multilayer-coated high-density toroidal grating

Details EUV performance of a multilayer-coated high-density toroidal grating EUV performance of a multilayer-coated high-density toroidal grating

Feb 1991

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1991spie.1343..566k&link_type=toc

Proc. SPIE Vol. 1343, p. 566-575, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, Richard B

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Optics

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