EUV And Soft X-ray Quantum Efficiency Measurements Of A Thinned, Back-illuminated CMOS APS For Solar Physics Applications

Astronomy and Astrophysics – Astrophysics

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Scientific paper

We report first absolute effective quantum efficiency (e-h pairs collected/predicted) measurements of a monolithic, thinned, back-illuminated CMOS Active Pixel Sensor (APS) in the EUV and soft X-ray region (13-600 Å). The sensor was designed and fabricated under a joint RAL/e2v research program, and characterized in the Lockheed Martin Solar and Astrophysics (LMSAL) XUV calibration facility. We compare our QE results to data and models developed for thinned CCDs with similar back surface passivation. Our results demonstrate that CMOS APS arrays show significant promise for use in space-based solar physics missions.

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