Epitaxial lead-chalcogenides on fluoride/Si for IR-sensor array applications

Physics

Scientific paper

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Scientific paper

MBE growth and IR device fabrication with epitaxial IV-VI layers on Si-substrates is reviewed and some new results are included. Epitaxy is achieved using a stacked BaF(subscript 2)/CaF(subscript 2) or CaF(subscript 2) buffer layer. While photolithographic delineation techniques are somewhat difficult with BaF(subscript 2) (which is soluble in water), reliable wet-etching techniques are easy with the CaF(subscript 2) buffer. Photovoltaic IV-VI sensors on Si(111) substrates are fabricated with cut-off wavelengths covering the whole atmospheric 3 - 5 and 8 - 14 micrometers window. They offer the possibility for low cost IR focal plane arrays with sensitivities similar to MCT, but with much less demanding material processing steps.

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