Enhanced Sputtering of Dielectric Materials and its Relationship to Track Registration

Details Enhanced Sputtering of Dielectric Materials and its Relationship to Track Registration Enhanced Sputtering of Dielectric Materials and its Relationship to Track Registration

Mar 1980

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1980lpi....11.1021s&link_type=gif

LUNAR AND PLANETARY SCIENCE XI, P. 1021-1023. Abstract.

Physics

Sputtering: Dilectric Materials, Track Registration, Sputtering

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