Energy resolution estimation of hemispherical deflector analyzers using electron ray-tracing simulation

Physics

Scientific paper

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Atomic, Molecular, And Charged-Particle Sources And Detectors

Scientific paper

A hemispherical deflector analyzer usually consists of an electrostatic input lens, two concentric hemispherical deflector plates and a channel electron multiplier. Input lens system is used to focus electron beam at the entrance of the hemispherical deflector which disperses the beam according to their energy, and a channel electron multiplier is used to detect electrons. In the present work, we investigated the energy resolution of hemispherical electron energy analyzers as a function electron energy, entrance angle of the beam, and analyzer radius both using ray-tracing and analytical method. Distributions of electrons at the exit of the analyzer were calculated for the total maximum angular divergences of 10 - 50. We expect this general approach to be of particular interest to investigators using modern HDAs.

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