Electrostatically actuated integrated optical nanomechanical devices

Details Electrostatically actuated integrated optical nanomechanical devices Electrostatically actuated integrated optical nanomechanical devices

Mar 1993

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1993spie.1793..259p&link_type=abstract

Proc. SPIE Vol. 1793, p. 259-272, Integrated Optics and Microstructures, Massood Tabib-Azar; Dennis L. Polla; Eds.

Physics

Optics

Scientific paper

We demonstrated that active integrated optical (IO) devices based on the
IO nanomechanical effect can be actuated by electrostatic forces. In
particular, we demonstrated: (1) an intensity modulator, (2) the
deflection, and (3) the focusing and defocusing of a guided wave in a
planar waveguide.

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