Electro-nanomechanically wavelength-tunable integrated-optical Bragg reflectors

Details Electro-nanomechanically wavelength-tunable integrated-optical Bragg reflectors Electro-nanomechanically wavelength-tunable integrated-optical Bragg reflectors

Feb 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997optco.135..385g&link_type=abstract

Optics Communications, Volume 135, Issue 4-6, p. 385-393.

Physics

Optics

4

Scientific paper

Electro-nanomechanical wavelength-tuning of integrated-optical (IO) Bragg reflectors is demonstrated at visible wavelengths. Micromachined bridges or membranes are spanned over the waveguide as `effective-refractive-index shifting elements' E in the region of a surface relief grating on the waveguide. Electrostatic forces cause elastic deflections of the elements E and, consequently, changes in the width of a typically 100-200 nm wide air gap between the element E and the waveguide. Thus the effective-refractive-index changes required for device operation are induced. The IO nanomechanical devices are fabricated with silicon technology; no electro-optic materials are required. The devices have response times of μs to ms. Potential applications as wavelength-tunable filters seem feasible.

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