Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

Details Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

2011-10-31

arxiv.org/abs/1110.6867v1

Physics

Optics

3 pages, 3 figures

Scientific paper

We investigate the performance of waveguide Bragg gratings as a function of
imperfections introduced in the fabrication process. Effects of stitching
errors introduced in the electron-beam and UV-lithography are discussed in
details.

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