Dynamic Wavefront Evaluation in Phase Shifting Interferometry Based on Recurrence Fringe Processing

Physics – Optics

Scientific paper

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Interferometry, Kalman Filters, Image Processing, Phase Measurement, Pattern Recognition, Phase Shifting Interferometry, Filters, Zone Plates, And Polarizers, Image Forming And Processing, Phase Retrieval, Pattern Recognition

Scientific paper

The method of recovering 3D unwrapped phase distribution in phase shifting interferometry is investigated. The method is based on dynamic recurrence processing of a set of fringe patterns involving the Kalman filtering algorithm with 3D spatial-temporal prediction of fringe parameters. The advantage of the suggested algorithm consist in dynamic evaluation of wavefront full phase with highest phase accuracy at the last phase shift step.

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