Dynamic phase microscopy: measurements of translational displacements at sub-nanometer scale

Physics – Instrumentation and Detectors

Scientific paper

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6 pages, 5 figures

Scientific paper

Dynamic phase microscopy has been applied for measurements of nanometer-scale
displacements of a piezoelectric scanner. This scanner, which was designed for
calibration purposes for scanning probe microscopy and TEM, exhibited a linear
and hysteresis-free translation in the 0.05-20 nm range. The voltage-activated
motion is described by a coefficient of 0.03 \pm 0.005 nm/V.

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