Dissociative electron attachment to the highly reactive difluoromethylene molecule-importance of CF2 for negative ion formation in fluorocarbon plasmas

Details Dissociative electron attachment to the highly reactive difluoromethylene molecule-importance of CF2 for negative ion formation in fluorocarbon plasmas Dissociative electron attachment to the highly reactive difluoromethylene molecule-importance of CF2 for negative ion formation in fluorocarbon plasmas

Aug 2010

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2010njph...12h3035g&link_type=abstract

New Journal of Physics, Volume 12, Issue 8, pp. 083035 (2010).

Physics

1

Scientific paper

Dissociative electron attachment to the highly reactive difluoromethylene molecule, CF2, produced in a C3F6/He microwave plasma and stepwise via the fast atom reaction CF3I+H→CF3+HI and CF3+H→CF2+HF, has been investigated. The upper limit for the cross section of formation of F- via dissociative electron attachment to CF2 is estimated to be 5×10-4 Å2. This value is four orders of magnitude smaller than the cross section previously predicted from scattering calculations. It is concluded that difluoromethylene plays a negligible role in negative ion formation in fluorocarbon plasmas.

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