Directly induced ablation of metal thin films by ultrashort laser pulses

Physics – Optics

Scientific paper

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Scientific paper

Molybdenum films on a glass substrate are ablated from the glass side by picosecond laser pulses at fluences below 1 J/cm2, without damage. Thin films of chromium, titanium and platinum with thicknesses between 200 nm and 1 μm were examined to investigate the underlying ablation mechanisms. For molybdenum an influence of the intermediate buffer layer was observed. Ablation from the glass side clearly has higher ablation efficiency and a better structural quality in contrast to metal side patterning. A model will be presented, in which the ablation characteristics are connected with the mechanical ductility of the metal.

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