Physics – Optics
Scientific paper
Feb 2011
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2011spie.7925e..27h&link_type=abstract
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XI. Edited by Heisterkamp, Alexander; Neev,
Physics
Optics
Scientific paper
Molybdenum films on a glass substrate are ablated from the glass side by picosecond laser pulses at fluences below 1 J/cm2, without damage. Thin films of chromium, titanium and platinum with thicknesses between 200 nm and 1 μm were examined to investigate the underlying ablation mechanisms. For molybdenum an influence of the intermediate buffer layer was observed. Ablation from the glass side clearly has higher ablation efficiency and a better structural quality in contrast to metal side patterning. A model will be presented, in which the ablation characteristics are connected with the mechanical ductility of the metal.
Heise Gerhard
Huber Heinz P.
Konrad Jan
Sarrach Sebastian
Sotrop Jürgen
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