Diamond Processing by Focused Ion Beam - Surface Damage and Recovery

Details Diamond Processing by Focused Ion Beam - Surface Damage and Recovery Diamond Processing by Focused Ion Beam - Surface Damage and Recovery

2011-08-03

arxiv.org/abs/1108.0850v1

Appl. Phys. Lett. 99, 183109 (2011)

Physics

Optics

12 pages, 3 figures

Scientific paper

10.1063/1.3658631

The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a detrimental effect on the color center luminescence. The FIB processing effect on single crystal diamond surfaces and their photonic properties is studied by Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) and photoluminescence (PL). Exposing the processed surface to hydrogen plasma, followed by chemical etching, drastically decreases implanted Ga concentration, resulting in a recovery of the NV- photo-emission and in a significant increase of the NV-/NV0 ratio.

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