Physics – General Physics
Scientific paper
2008-01-07
Dans 13th International Worshop on THERMal INvestigations of ICs and Systems - THERMINIC 2007, Budapest : Hongrie (2007)
Physics
General Physics
Submitted on behalf of TIMA Editions (http://irevues.inist.fr/tima-editions)
Scientific paper
In this investigation, the numerical simulation of electrohydrodynamic (EHD) ion-drag micropumps with micropillar electrode geometries have been performed. The effect of micropillar height and electrode spacing on the performance of the micropumps was investigated. The performance of the EHD micropump improved with increased applied voltage and decreased electrode spacing. The optimum micropillar height for the micropump with electrode spacing of 40$\mu$m and channel height of 100$\mu$m at 200V was 40$\mu$m, where a maximum mass flow rate of 0.18g/min was predicted. Compared to that of planar electrodes, the 3D micropillar electrode geometry enhanced the overall performance of the EHD micropumps.
Ching Chi Yu
Lee Kenneth K. C.
Robinson Jeffrey A.
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