Physics
Scientific paper
Sep 1999
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1999spie.3823..212b&link_type=abstract
Proc. SPIE Vol. 3823, p. 212-221, Laser Metrology and Inspection, Hans J. Tiziani; Pramod K. Rastogi; Eds.
Physics
Scientific paper
We have developed an optical system which permits the absolute positioning of an element with respect to a reference laser beam. The resolution is of the order of 10 micrometer in translation and 50 (mu) rad in rotation. It is highly transparent (greater than 90%) permitting several elements to be aligned. A calibration procedure has also been studied in order to be independent of internal deformations.
Barriere J.-Ch.
Cloue O.
Guyot C.
Ponsot P.
Saudemont J.-C.
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