Development of a deep-UV Mirau correlation microscope

Details Development of a deep-UV Mirau correlation microscope Development of a deep-UV Mirau correlation microscope

May 1994

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2196...35c&link_type=abstract

Proc. SPIE Vol. 2196, p. 35-46, Integrated Circuit Metrology, Inspection, and Process Control VIII, Marylyn H. Bennett; Ed.

Physics

Scientific paper

Progress is being made on the development of a deep UV interferometric microscope to operate at a wavelength of 248 nm. The eventual aim is to make measurements of 0.18 - 0.25 micrometers gate structures. The microscope employs a mercury vapor light source, an image intensifier with a CCD or vidicon camera, and quartz lenses. The device is based on the Mirau correlation microscope, and uses a Mirau interferometer with a new type of radially sectored beamsplitter. Feasibility has been demonstrated.

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