Physics – Optics
Scientific paper
Feb 1994
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2011..334s&link_type=abstract
Proc. SPIE Vol. 2011, p. 334-346, Multilayer and Grazing Incidence X-Ray/EUV Optics II, Richard B. Hoover; Arthur B. Walker; Eds
Physics
Optics
Scientific paper
Interfacial roughness correlation in W/C multilayer films with periods of 23 angstroms, 30 angstroms, and 37 angstroms is examined with x-ray diffraction using (lambda) in the 10 angstroms to 13 angstroms range and (lambda) equals 1.54 angstroms. Transverse scans through multilayer Bragg reflections are analyzed to determine the magnitude and lateral correlation length of the component of interfacial roughness that is perfectly correlated through the multilayer stack. The results are independent of wavelength, even though hard x rays sample match more deeply into the film, indicating that interfacial roughness is not changing through these films.
Lagally Max G.
Mackay James F.
Phang Yew-H.
Rownd J. J.
Savage Don E.
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