Design of an imaging microscope for soft X-ray applications

Details Design of an imaging microscope for soft X-ray applications Design of an imaging microscope for soft X-ray applications

Jan 1988

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1988spie..984..234h&link_type=abstract

IN: X-ray multilayers for diffractometers, monochromators, and spectrometers; Proceedings of the Meeting, San Diego, CA, Aug. 17

Physics

Optics

3

Cassegrain Optics, Microscopes, Mirrors, Ray Tracing, X Ray Imagery, X Ray Telescopes, Diffraction Limited Cameras, Spatial Resolution, Spectroheliographs, X Ray Spectra

Scientific paper

An imaging soft X-ray microscope with a spatial resolution of 0.1 micron and normal incidence multilayer optics is discussed. The microscope has a Schwarzschild configuration, which consists of two concentric spherical mirrors with radii of curvature which minimize third-order spherical aberration, coma, and astigmatism. The performance of the Stanford/MSFC Cassegrain X-ray telescope and its relevance to the present microscope are addressed. A ray tracing analysis of the optical system indicates that diffraction-limited performance can be expected for an object height of 0.2 mm.

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