Design of a capacitive sensor for 3D relative displacement measurements to align the M1 segments of the Mexican Infrared Telescope (TIM)

Physics

Scientific paper

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Scientific paper

This article presents the design of a capacitive sensor that can detect
piston errors as well as lateral displacements between two adjacent MI
segments. Due to the measurements' statistical analysis the resolution
acquired will be nanometric. This precision is required to achieve the
image quality expected for the whole primary segmented-mirror.

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