Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions

Details Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions

Sep 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3353..805m&link_type=abstract

Proc. SPIE Vol. 3353, p. 805-815, Adaptive Optical System Technologies, Domenico Bonaccini; Robert K. Tyson; Eds.

Physics

Optics

Scientific paper

This paper describes the design, fabrication, modeling, surface characterization, and simulation of advanced surface micromachined micromirror devices that are optimized for adaptive optics applications. Design considerations and fabrication capabilities are presented. Simulation of adaptive optics performance of unique Flexure-Beam and Axial-Rotation Micromirror devices is performed for many common aberrations. These devices are fabricated in the state-of-the-art four-level planarized polysilicon process available at Sandia National Laboratories known as the Sandia Ultra-planar Multi-level planarized MEMS Technology. This enabling process permits the development of micromirror devices with near-ideal characteristics that have previously been unrealizable in standard three-layer polysilicon processes. This paper describes such characteristics as elevated address electrodes, array wiring techniques, planarized mirror surfaces using chemical mechanical polishing, unique post-process metallization, and the best active surface area to date.

Affiliated with

Also associated with

No associations

Rating

Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions does not yet have a rating. At this time, there are no reviews or comments for this scientific paper.

If you have personal experience with Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Design and simulation of advanced surface micromachined micromirror devices for telescope adaptive optics applictions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFWR-SCP-O-1055160