Design and Measurement of a 600 GHz Micromachined Horn Antenna Manufactured by Combined DRIE and KOH-Etching of Silicon

Details Design and Measurement of a 600 GHz Micromachined Horn Antenna Manufactured by Combined DRIE and KOH-Etching of Silicon Design and Measurement of a 600 GHz Micromachined Horn Antenna Manufactured by Combined DRIE and KOH-Etching of Silicon

May 2005

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2005stt..conf..507b&link_type=article

Sixteenth International Symposium on Space Terahertz Technology, held May 2-4, 2005 at Chalmers University of Technology. Göte

Physics

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