Design and fabrication of 128x128 diffractive microlens arrays on SI substrates

Details Design and fabrication of 128x128 diffractive microlens arrays on SI substrates Design and fabrication of 128x128 diffractive microlens arrays on SI substrates

Aug 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3505...19l&link_type=abstract

Proc. SPIE Vol. 3505, p. 19-24, Imaging System Technology for Remote Sensing, Mingzhi Wei; Xinjian Yi; Jianzhong Han; Fiodor F.

Physics

Scientific paper

128 by 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3-5 micrometers wavelength with a microlens size of 100 micrometers . The lens F number and array pitch are 1.5 and 100 micrometers , respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar(superscript +) ion-beam-etching technique. The practical and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.

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