Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays

Details Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays Design and fabrication of 128X128 diffractive microlens arrays for infrared focal plane arrays

Sep 1998

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1998spie.3545..210l&link_type=abstract

Proc. SPIE Vol. 3545, p. 210-213, International Symposium on Multispectral Image Processing (ISMIP'98), Ji Zhou; Anil K. Jain; T

Physics

1

Scientific paper

128 X 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3 - 5 micrometers wavelength with a microlens size of 100 micrometers . The lens F number and array pitch are 1.5 and 100 micrometers , respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.

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