Design, analysis, and experimental results for the wobble motor: an eccentric-motion electrostatic microactuator

Details Design, analysis, and experimental results for the wobble motor: an eccentric-motion electrostatic microactuator Design, analysis, and experimental results for the wobble motor: an eccentric-motion electrostatic microactuator

Nov 1989

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1989spie.1167..122j&link_type=toc

Proc. SPIE Vol. 1167, p. 122-0, Precision Engineering and Optomechanics, Daniel Vukobratovich; Ed.

Physics

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