Deposition of Hg-based HTS(1212) thin-films by a newly designed single source MOCVD system.

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Scientific paper

Mercury-based superconducting HgBa_2CaCu_2O_6+δ thin-films have been successfully deposited on SrTiO3 in a rapid manner by a newly designed MOCVD system. The preparation of mercury-based superconducting HgBa_2CaCu_2O_6+δ thin-films is composed of two steps, deposition of non-Hg precursor films (Ba_2CaCu_2O_2n+2+δ), (n=1, 2, 3...) by MOCVD and then followed by annealing in controlled Hg Vapor. In this two-step process, mercury is provided to the enclosed sample through solid/vapor reaction. Further oxygen annealing improved the quality of the films to great extent. We have studied the transport properties of the films deposited on SrTiO_3. The transition temperature (T_c) of 108^circK, and a onset around 123 ^circK is observed. For the same film after annealing,a clear transition to zero resistance is observed at 121^circK. The X-ray diffraction patterns for those films indicate that the growth is along the c-axis. We have a wide control over the fast fabrication procedure and the results show consistent good qualities of the films.

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