Demonstrating sub-nm closed loop MEMS flattening

Details Demonstrating sub-nm closed loop MEMS flattening Demonstrating sub-nm closed loop MEMS flattening

Jun 2006

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2006oexpr..14.5558e&link_type=abstract

Optics Express, vol. 14, Issue 12, pp.5558-5570

Physics

Optics

9

Adaptive Optics, Microstructure Devices, Astronomical Optics

Scientific paper

Ground based high-contrast imaging (e.g. extrasolar giant planet detection) has demanding wavefront control requirements two orders of magnitude more precise than standard adaptive optics systems. We demonstrate that these requirements can be achieved with a 1024-Micro-Electrical-Mechanical-Systems (MEMS) deformable mirror having an actuator spacing of 340 µm and a stroke of approximately 1 µm, over an active aperture 27 actuators across. We have flattened the mirror to a residual wavefront error of 0.54 nm rms within the range of controllable spatial frequencies. Individual contributors to final wavefront quality, such as voltage response and uniformity, have been identified and characterized.

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