Decontamination of Genesis Array Materials by UV Ozone Cleaning

Details Decontamination of Genesis Array Materials by UV Ozone Cleaning Decontamination of Genesis Array Materials by UV Ozone Cleaning

Mar 2007

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2007lpi....38.1627c&link_type=abstract

38th Lunar and Planetary Science Conference, (Lunar and Planetary Science XXXVIII), held March 12-16, 2007 in League City, Texas

Physics

3

Scientific paper

XPS and spectroscopic ellipsometry are used to evaluate the
effectiveness of UV ozone cleaning for removing a carbon based surface
contaminate on silicon and sapphire semiconductor materials from NASA's
Genesis solar wind sample return mission.

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