Decontaminating Solar Wind Samples with the Genesis Ultra-Pure Water Megasonic Wafer Spin Cleaner

Details Decontaminating Solar Wind Samples with the Genesis Ultra-Pure Water Megasonic Wafer Spin Cleaner Decontaminating Solar Wind Samples with the Genesis Ultra-Pure Water Megasonic Wafer Spin Cleaner

Mar 2009

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=2009lpi....40.1183c&link_type=abstract

40th Lunar and Planetary Science Conference, (Lunar and Planetary Science XL), held March 23-27, 2009 in The Woodlands, Texas, i

Physics

4

Scientific paper

The cleaning efficiency of the Genesis Ultra-pure Water Megasonic Wafer
Spin Cleaner will be presented. Results show the effectiveness of the
new cleaner removing particle contamination from Genesis silicon wafers
implanted with solar wind.

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