Continuous-membrane surface-micromachined silicon deformable mirror

Details Continuous-membrane surface-micromachined silicon deformable mirror Continuous-membrane surface-micromachined silicon deformable mirror

May 1997

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1997opten..36.1354b&link_type=abstract

Optical Engineering 36(05), 1354-1360, Brian J. Thompson; Ed.

Physics

20

Scientific paper

The authors describe the development of a new type of micromachined device designed for use in correcting optical aberrations. A nine-element continuous deformable mirror was fabricated using surface micromachining. The electromechanical behavior of the deformable mirror was measured. A finite-difference model for predicting the mirror deflections was developed. In addition, novel fabrication techniques were developed to permit the production of nearly planar mirror surfaces.

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