Physics – Optics
Scientific paper
Jun 1994
adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1994spie.2199..176k&link_type=abstract
Proc. SPIE Vol. 2199, p. 176-180, Advanced Technology Optical Telescopes V, Larry M. Stepp; Ed.
Physics
Optics
Scientific paper
A novel computer-controlled method has been developed for grinding and polishing thin and a flexible mirrors and other optical components. The method makes use of the surface pressure induced by a partial vacuum between the tool and the workpiece. Based on the measured errors of the shape of the workpiece, the surface pressure is regulated dynamically by varying the partial vacuum under computer control while the tool is moving on the workpiece. To increase the figuring efficiency, several non-rotating tools are used simultaneously in a linear array across the optics. The method has been developed and tested using a 0.5 m thin blank and a small computer-controlled polishing machine. A description is presented of the developed equipment and of the experience gained in the use of the method.
Korhonen Tapio K.
Lappalainen Timo
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