Comparative study of SWIR and MWIR Schottky-barrier imagers

Physics

Scientific paper

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Scientific paper

A 512 pixel truly linear infrared (IR) charge coupled device (CCD) with Schottky barrier sensors and buttable edges has been developed, incorporating three different silicides working in the front-side illumination mode. The main differences between these silicides are the cut- off wavelength and the operating temperature. CoSi(subscript 2) and NiSi show a cut-off wavelength of about 2.8 micrometers allowing an operating temperature of 150 K and passive cooling, whereas PtSi has a cut-off wavelength of about 6 micrometers working at 77 K. All three devices present a good photoresponse uniformity along the sensor row and also a good noise behavior.

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