Compact fast-acting shutter for a multiple-position, planetary workholder

Details Compact fast-acting shutter for a multiple-position, planetary workholder Compact fast-acting shutter for a multiple-position, planetary workholder

Jun 1977

adsabs.harvard.edu/cgi-bin/nph-data_query?bibcode=1977rsci...48..702b&link_type=abstract

Review of Scientific Instruments, Volume 48, Issue 6, pp. 702-703 (1977).

Computer Science

Vacuum Deposition

Scientific paper

A compact shutter system for a vacuum coating plant is described which
has simultaneous operation on three substrate positions on a planetary
workholder. The shutter is located close to the substrate surfaces and
can be fully opened in approximately 0.2 sec and closed in less than 0.1
sec.

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